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Iso Valve Gate Valve Cylinder 안 전 기타 공정생산성 개선
Particle 감소 / 300mm Gate Valve
Particle 감소 / 200mm Gate Valve
Particle Deposition 방지
Valve 오동작 감지

Gate Valve Air Leak 감지(Cylinder 내부 및 Shaft Packing 파손 감지 )

SND - 압력 LEAK SENSOR - 4
SND - 압력 LEAK SENSOR - 8
SND - 압력 LEAK SENSOR - 16
LCD GATE VALVE 용

Air Leak 감지 적용예

ORIGINAL - DAS DOOR - D
ORIGINAL - 200MM LAM DOOR - L
ORIGINAL - PC1 GATE DOOR - P
ORIGINAL - SMC GATE DOOR - S
ORIGINAL - DPS VAT VERTICAL DOOR - V
ORIGINAL - OPUS SLIT VALVE - O
ORIGINAL - 200mm SLIT VALVE - S

SND – ASPEN SLIT DOOR – A