Iso Valve Gate Valve Cylinder 안 전 기타 공정생산성 개선 Particle 감소 / 300mm Gate Valve Particle 감소 / 200mm Gate Valve Particle Deposition 방지 Valve 오동작 감지 300mm Gate Valve SND - HEATER SLD DOOR - S SND – HEATER SLD DOOR – S(개선후) SND - DEF & HEATER 200mm SLIT VALVE - S SND - DEF & HEATER OPUS SLIT VALVE - O ORIGINAL – OPUS SLIT VALVE(개선전) SND-DEF & HEATER OPUS SLIT VALVE (개선후) 200mm Gate Valve SND - DEF & HEATER 200mm SLIT VALVE - S SND - DEF & HEATER 200mm SLIT VALVE - S ORIGINAL – 200mm SLIT VALVE – S(개선전) SND – DEF & HEATER 200mm SLIT VALVE – S(개선후) ORIGINAL - TCP 9600 GATE DOOR - T SND - DEF & HEATER TCP9600 GATE DOOR - T SND – DEF & Heater – TCP9600 GATE DOOR – T(개선후) ORIGINAL - DAS DOOR - D SND - DEF & HEATER DAS DOOR - D ORIGINAL – DAS DOOR – D SND – DEF DAS DOOR – D