구동 Speed 조절( Fast-Slow-Slow-Fast)
200mm Gate Valve
ORIGINAL – DAS DOOR – D(개선전)
SND – DEF DAS DOOR – D(개선후)
ORIGINAL-200mm LAM DOOR-L(개선전)
SND -DEF 200mm LAM DOOR – L(개선후)
ORIGINAL-PC1 GATE DOOR-P(개선전)
SND – DEF PC1 GATE DOOR-P(개선후)
ORIGINAL – 200mm SLIT VALVE-S(개선전)
SND – DEF 200mm SLIT VALVE – S(개선후)